JPH0617284Y2 - マイクロ波プラズマ処理装置 - Google Patents

マイクロ波プラズマ処理装置

Info

Publication number
JPH0617284Y2
JPH0617284Y2 JP14662288U JP14662288U JPH0617284Y2 JP H0617284 Y2 JPH0617284 Y2 JP H0617284Y2 JP 14662288 U JP14662288 U JP 14662288U JP 14662288 U JP14662288 U JP 14662288U JP H0617284 Y2 JPH0617284 Y2 JP H0617284Y2
Authority
JP
Japan
Prior art keywords
circular waveguide
generation chamber
microwaves
plasma
plasma generation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP14662288U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0267637U (en]
Inventor
正治 西海
佳恵 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14662288U priority Critical patent/JPH0617284Y2/ja
Publication of JPH0267637U publication Critical patent/JPH0267637U/ja
Application granted granted Critical
Publication of JPH0617284Y2 publication Critical patent/JPH0617284Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP14662288U 1988-11-11 1988-11-11 マイクロ波プラズマ処理装置 Expired - Lifetime JPH0617284Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14662288U JPH0617284Y2 (ja) 1988-11-11 1988-11-11 マイクロ波プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14662288U JPH0617284Y2 (ja) 1988-11-11 1988-11-11 マイクロ波プラズマ処理装置

Publications (2)

Publication Number Publication Date
JPH0267637U JPH0267637U (en]) 1990-05-22
JPH0617284Y2 true JPH0617284Y2 (ja) 1994-05-02

Family

ID=31416283

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14662288U Expired - Lifetime JPH0617284Y2 (ja) 1988-11-11 1988-11-11 マイクロ波プラズマ処理装置

Country Status (1)

Country Link
JP (1) JPH0617284Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2607832B2 (ja) * 1993-12-17 1997-05-07 株式会社日立製作所 マイクロ波プラズマ処理方法

Also Published As

Publication number Publication date
JPH0267637U (en]) 1990-05-22

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